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High Vacuum
- Energy Saving
- By Industry ⁄ Process
- Applications
Can be used at high vacuum of 10-6 Pa. This valve can be used for the exhaust systems, supply systems and block systems of vacuum chambers.
Exhaust System
| ・Aluminum High Vacuum Angle Valve | XL Series |
| ・Aluminum One-touch Connection and Release High Vacuum Angle Valve | XLAQ/XLDQ Series |
| ・Stainless Steel High Vacuum Angle/In-line Valve | XM/XY Series |
Supply System
| ・High Vacuum Straight Solenoid Valve | XSA Series |
| ・Smooth Vent Valve | XVD Series |
Block System
| ・For 300 mm wafer Parallel Seal Type Slit Valve | XGTP Series |
| ・Slit Valve | XGT Series |
| ・Door Valve (Made to Order) | Please inquire details |
Transfer System
| ・Rodless Cylinder for Vacuum | CYV Series |
