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High Vacuum
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For 300 mm Wafer: Parallel Seal Type Slit Valve XGTP
High Vacuum Equipment » Slit ValvesEquipment for the Semiconductor Industries » Slit Valve/Transfer
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・Long service life: 3 million cycles (within standard temperature range)
・Low particle generation: Reduced by 1/5 or more
(compared with the existing product)
・Easier maintenance
Easy replacement of bellows
Gate can be replaced from above. (Made to order)
・Safety measures
A mechanical end lock mechanism has been adopted.
Safety Instructions System Configuration/Role of Each Line and Component Series Variations Glossary Green Procurement (RoHS)
| Series | Operating environmental pressure (Pa)(abs) | Fluid | Opening window size (Height x Width) (mm) | Operating pressure (MPa)(G) |
|---|---|---|---|---|
| XGTP | Atmospheric pressure to 10-6 | Inert gas | 50 x 336 | 0.45 to 0.6 |
