Solutions » Introduction to Industry-Specific Solutions » Photovoltaic Cell Manufacturing Process Equipment » 
Corrosion Resistant
 

|Water Resistant
|High Purity (Fluoropolymer)
|Gas Resistant
Improved resistance to corrosion by chlorine gas due to oxalic acid anodized treatment.
High Vacuum Equipment
| ・Aluminum High Vacuum Angle Valve | XL Series | 
| ・Aluminum One-touch Connection and Release High Vacuum Angle Valve  | 
  XLAQ/XLDQ Series | 
| ・Stainless Steel High Vacuum Angle/In-line Valve | XM/XY Series | 
| ・Slit Valve | XGT Series | 
| ・For 300 mm wafer Parallel Seal Type Slit Valve | XGTP Series | 





































